High Performance Cryopump from Brooks Automation

• Extremely high pumping speeds insure faster pump down times – and more production uptime
• New cryogenic refrigerator design allows for high temperature operation and greater vacuum reliability
• Clean, dependable vacuum
• Oil-free operation eliminates high LN2 costs while providing better vacuum quality
• Fast and easy maintenance with low overall operating cost
• Backed by legendary Helix service and support, worldwide

The Cryo-Torr 20HP High Performance Cryopump is the perfect solution for metal deposition, optical coating, space simulation and other applications – such as flat panel display manufacturing – where the speed, cleanliness and reliability offered by a large diameter cryopump is essential to achieving optimum performance and throughput.