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Granville-Phillips® 830 Vacuum Quality Monitor System
 

From Brooks Automation

The Simplicity Solutions 830 Vacuum Quality Monitor (VQM) System is the world’s fastest, lowest power mass spectrometer with full data collection, spectral deconvolution, and data logging at 85 ms capture rates for the full 1-135 amu measurement range. Compared to traditional Quadrupole Residual Gas Analyzers (RGAs), the 830 VQM is 20 times faster, uses 80% less power, is smaller, easier to calibrate, and can accurately represent low amu gases. Out of the box you get the following all through intuitive software at the full 85 ms sampling rate:

  • Your 10 most prevalent gases
  • Total pressure trending
  • Partial pressure trending
  • Spectral display
  • Data logging
  • Leak check

 

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The 830 VQM is a mass spectrometer that operates from UHV to 10-5 Torr and accurately measures gases in the 1-135 amu range. The system consists of an electrostatic ion trap gauge, a VQM controller, and VQM Viewer software that converts raw data to actionable information. With the 830 VQM System you get the benefits of:

  • Partial pressure transient detection
  • Simple setup including fast calibration using any single gas that is already in your vacuum system
  • Remote mounting of the mass spectrometer gauge
  • Small size which reduces outgasing

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www.brooks.com
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830 Vacuum Quality Monitor
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