Megatech Limited - Enabling Technology
products
Affinity Chillers
Semiconductor
Brooks - Polycold Systems
Brooks - CTI-Cryogenics®
Brooks - Granville-Phillips®
CO2 Snow Jet Cleaning
Comdel
Entegris
Ferrotec - Ferrofluidic Seals
Ferrotec - Electron Beam Guns
Mactronix
Process Sensors
RASIRC UHP Steam
Reactaflo
Thermal Evaporation Sources
UVOCS
Verity Instruments
Lytron Affinity® Chillers
 

Semiconductor Products

Lytron provides a broad array of thermal management systems for chip manufacturing technologies, specializing in the design and manufacture of OEM chillers for high-end applications. Our global support infrastructure maximizes customer uptime and optimizes tool performance for demanding production environments.

Features

  • Industry Leading Ramp Times
  • Audible flow and level alarms
  • Extended process temperature ranges form from –85°C to 200°C
  • Flow, temperature, and reservoir level alarms
  • Microprocessor & PLC controllers, Graphical User Interfaces
  • Plate heat exchange technology
  • Portable- No facility water required
  • Process fluid flow control valve
  • Temperature stability to +/- .5°C

Benefits

  • Ease of Use and Operation
  • Efficient cooling
  • Lower Utility Consumption
  • Low Cost of Ownership
  • High uptime
  • Quiet operation
  • Maximize Throughput
  • Enhanced Process Control, Improved Yields
  • User Selectable Communications and Coolants Options

Click on the image below to visit the Lydall Affinity website, alternatively click here.

 
TECHNICAL
Product
Data Sheets - Etch
Heat Exchanger
Single Channel Chiller
Barrier Chiller
Dual Channel Chiller
Thermo Electric Chiller
Data Sheets - Implant
Triple Loop Heat Xchanger
Triple Loop Chiller
Disc Chiller
Remote Platen Chiller
End Station Chiller
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