From Brooks Automation
- CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
- Consistent process performance
- Higher tool productivity via significantly increased cryopump uptime
- Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
- Fast Regen™ capability extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
- GOLDLink® compatible for productivity protection 24/7, worldwide
- Backed by legendary Helix service and support, worldwide
On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.

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