Megatech Limited - Enabling Technology
products
Affinity Chillers
Brooks - Polycold Systems
Brooks - CTI-Cryogenics®
On-Board® IS Cryopump Systems
On-Board® Cryopumps
On-Board® Waterpumps
Cryo-Torr® Cryopumps
Cryo-Torr® 20HP Cryopump
Compressors
Cryodyne Refrigerators
Brooks - Granville-Phillips®
CO2 Snow Jet Cleaning
Comdel
Entegris
Ferrotec - Ferrofluidic Seals
Ferrotec - Electron Beam Guns
Mactronix
Process Sensors
RASIRC UHP Steam
Reactaflo
Thermal Evaporation Sources
UVOCS
Verity Instruments
On-Board® Cryopumps
 

From Brooks Automation

  • CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
  • Consistent process performance
  • Higher tool productivity via significantly increased cryopump uptime
  • Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
  • Fast Regen™ capability extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
  • GOLDLink® compatible for productivity protection 24/7, worldwide
  • Backed by legendary Helix service and support, worldwide

On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.

 
 
TECHNICAL
On-Board Cryopumps
Product
Product Data Sheets
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