PFC Fast Cycle Water Vapour Pump

The PFC Water Vapor Cryopump will increase product throughput in your existing vacuum system 20% to 100% and improve the quality of deposition.

General Specifications

• -100° to -150°C (-148° to -238°F, 173 to 123 K)
• Fast cooling, fast defrost
• Simple tube-type cold element (e.g., cryocoil or Meissner coil)
• Heat removal to 3600 watts
• Cryocondenses water vapor in vacuum systems with speeds to 200,000 L/sec, vacuum levels to 1.5 x 10-12torr, depending on model and application
• Provides very fast pumping speeds for water vapor, which is typically 65% to 95% of the gas load in high vacuum systems.

Benefits

• High-vacuum pumpdown time cut by 25% to 75%
• High-speed pumping of water vapor: 10,000 to 200,000 l/sec in the workplace
• Increased product throughput of 20% to 100%
• Typical payback times of less than one year
• Lower water vapor partial pressure during processing for higher quality, better adhesion and more reproducible deposition
• Superior in cost/performance to liquid nitrogen cooled Meissners

How the PFC works

Using Polycold® Systems’ patented cryogenic refrigeration process, the PFC works on the principle of Meissner trapping. Water vapor is captured by condensation on a cryogenically cooled surface, called a Meissner coil. The Meissner (cryocoil) is mounted directly in the vacuum chamber so conductance is not limited by ports, manifolds, valves, and baffles. The cryocoil is easy to install and can be adapted to fit any system. It does not need a high-vacuum valve.

Choosing the right size PFC

PFC units size are based on the desired water vapor pumping speed and the ability of the chamber to accommodate the required amount of cold element (cryocoil) surface area. The larger the cryocoil, the greater the pumping speed. Typically, we recommend a minimum increase in chamber net speed of four times the existing (net in-chamber) water vapor pumping speed.

Features

• Factory-charged with CFC-free refrigerant
• Temperature indicator with differential analog output
• Electronic controller to terminate defrost
• Control module for local manual control
• Remote connector to permit operation with your controller or your manual controls. (Remote operation requires relays, switches and wiring by end-users)

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