GateKeeper® Gas Purifiers

GateKeeper® point-of-use purifiers offer maximum flow rates from 1-60 slpm and integrated particle filtration. Designed for point-of-use gas purification at the tool or in the gas box, Entegris GateKeeper purifiers are economical ways to prevent contamination of the process or damage to the tool.

GateKeeper® area and bulk purifiers offer maximum flowrates from 100-40,000 slpm. Applications include multi-tool purification, facility purification, back-pad purifiers, getter back-ups, and all applications requiring high flow rates or with very high contaminant challenges.

GateKeeper® drop-in replacement models easily replace lower capacity competitive units. The unique offset design of the 30KF series of purifiers allows for the replacement of 7/8" diameter flush mounted micro purifiers or particle filters with a high capacity purifier/filter combination. Other drop-in designs replace higher cost competitor purifiers and meet form, fit and function with lower cost-of-ownership, higher performance, and greater safety.

GateKeeper® purifiers are available in a wide array of optional configurations to meet specific application requirements. Available options include inlet and outlet isolation valves, bypass manifolds, and BreakThruT end-of-life detectors.

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