Aeronex® Gas Purification Systems

The Aeronex® Gas Purification System is a stand-alone system offering in-situ regeneration with advanced controls. The dual-bed design guarantees a continuous supply of ultrapure gas so there is no need to send a purifier back for regeneration or to install an expensive replacement cartridge. More importantly, there is no need to interrupt your process. The pre-programmed controller knows when to switch to the fresh purifier and when to regenerate the other.

• Dual-bed self-regenerating system
• Delivers a continuous supply of pure gas at sub-ppb levels
• Removes H2O, O2, CO, CO2, and non-methane hydrocarbons to less than 1ppb
• Generate the following UHP gases:
  • H2 (H Series)
  • NH3 (SK Series)
  • XCDAT (Z Series)
  • Inert gases (I Series)
• Ambient temperature purification technology
• Low utility requirements
• Lowest cost-of-ownership
• Low pressure drop
• No damage due to power outages
• Designed to CE and SEMI S2 Standards

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