Megatech Limited - Enabling Technology
products
Gas Purification
GateKeeper® Gas Purifiers
Aeronex® Gas Purification Systems
Affinity Chillers
CO2 Snow Jet Cleaning
Comdel
Entegris
Ion Gauge Tubes
Mactronix
Polycold Systems
Quartz Monitor Crystals
RASIRC UHP Steam
Reactaflo
Rigaku Vacuum Products
Telemark
Thermal Evaporation Sources
UVOCS
Verity Instruments
Gas Purification

 

Entegris gas purifiers give customers a competitive edge through improved process control and greater yield. Available for area, bulk, and point-of-use applications, GateKeeper® purifiers and Aeronex® gas purification systems remove contaminants such as H2O, O2, CO, CO2, H2, hydrocarbons, sulfur compounds and more, to sub-ppb levels from bulk and specialty gases.

Standard and custom solutions are available for a wide range of gas purification applications. Some common gases purified include, nitrogen, clean dry air (CDA), corrosives, ammonia, hydrogen, arsine, and helium. Additionally, Entegris offers high capacity gas purifiers that "drop-in" and replace short-lived competitive units and lead to a lower cost-of-ownership.

Benefits of purification include improved process yield and greater process control through the elimination of molecular contaminants such as oxygen, moisture or hydrocarbons. The elimination of contaminants results in higher material quality and device performance. Purifiers have also been proven to extend the life of process control components used in corrosive gas service.

Entegris is the leader in gas purity issues related to microcontamination and gas consistency and offers solutions that allow customers to focus on other ways to differentiate themselves from their competitors. Whether customers require bulk, point-of-use, or custom purification systems, Entegris has the engineered solutions to help them succeed in a competitive business environment.

 
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