Author Archives: Alan

Vacuum Expo 2015

14th & 15th October 2015, Ricoh Arena, Coventry

Once again Megatech will be exhibiting at the UK’s showcase event for vacuum technoloies. Come and see us on Stand W30 where we will be presenting our extensive range of vacuum instrumentation and components.

Megatech awarded Top 10 Supplier Status

Every year the National Microelectronics Institute (NMI)  conducts a survey of the UK microchip manufacturing sites to obtain inputs regarding their suppliers. The poll asks key staff to vote for their best supplier based on the following criteria:

  1. Flexibility & responsiveness to customer requests
  2. Quality of product or service
  3. Business impact of service or product
  4. Continuous improvement practices

As well as recognising the overall  highest scoring supplier, the NMI awards those companies who were voted into the top 10 a certificate of merit and web badge to recognise their high ranking performance. We are proud to announce  that from the list of over 100 candidates, Megatech  was voted as being one of the Top 10 suppliers.



Vacuum Expo 2014

Ricoh Arena , Coventry, UK , 15-16 October 2014

Megatech will be exhibiting at the UK’s premier vacuum technology event in Coventry. Join us on Stand V29 where we will be featuring our comprehensive range of components for use in Magnetron Sputtering.

Brooks Instrument add Megatech as new specialty representative serving strategic Semiconductor and Thin-Film customers in the United Kingdom and Ireland

Megatech are pleased to announce that they have been appointed as Brooks Instrument’s new specialty representative serving strategic Semiconductor and Thin-Film customers in the United Kingdom and Ireland.

Brooks Instrument provides the broadest array of flow products in the market. Their award-winning flow meters and flow controllers consistently rank at the top of their category for accuracy, reliability, and user preference, as judged by the audience that matters – users of flow instruments.

More details to follow soon.

New Website with Web Sales

Hello and welcome to the new look Megatech website. The major innovation for us is the addition of   a web store allowing direct purchase of some of our products from the site.

Over the coming weeks we will be adding further products to the store, but for now we have a selection of Thermal Evaporation Sources and Quartz Monitor Crystals available for purchase.

Christmas Holidays 2012

Megatech will be closing for our Christmas holidays at midday on Friday 21st December 2012. Our office will open again on Wednesday 2nd January 2013.

We would like to take this opportunity to wish all our customers and partners a very Merry Christmas and a prosperous New Year!

RASIRC Process News August 29, 2012

RASIRC Process News
August 29, 2012
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Foundry TOX grown 87% faster with New RASIRC Process

1000Å thick films on 300mm silicon wafer within 1.5% StdDev


Joint development between WRS Materials and RASIRC produced improved thermal oxide uniformity on 300 mm wafers while reducing the thermal oxide step from 100 minutes to 13 minutes.Tests recently confirmed a breakthrough in oxide film growth. 1000 Å films can now be grown on 300 mm wafers 87% faster than previously done with dry oxide. The new process involves a high flow rate of steam and oxygen. Uniformity was proven to be within 1.5% standard deviation. The faster process will allow manufacturers to increase production without adding new furnace tubes.
The new process overcomes serious technical challenges. To prevent uniformity issues, the process chamber is rapidly saturated with steam and oxygen. The steam is ultra-high purity, eliminating microdroplets. The oxygen is heated, avoiding condensation when the gases are blended.


Other devices commonly used to generate steam flow are inadequate for this application. Bubblers deliver only 15 slm and entrain droplets that cause non-uniformity. Torches operate at extremely high temperatures and consume volatile gases. As a result, torches have high costs, safety risks and special facility requirements.


The two companies have collaborated on a paper that details test protocols, results and provides guidelines for flow rate, thermal oxide thickness, and uniformity to optimize process recipe and reduce the time needed to achieve uniformity relative to gas flow rate.

New Product Release


Following the results of the joint development with WRS Materials, RASIRC commercialized the Steamer Turbo. RASIRC Steamer Turbo meets high flow requirements, saturating 400 mm furnaces in less than 2 minutes.
This device delivers ultra high purity steam blended with oxygen for high flow rate applications. The Steamer Turbo is able to deliver up to 100 slm of high temperature compressed gas with 50 slm of steam repeatable to ±1%


RASIRC wins Golden Gases Award

RASIRC was recently awarded the Golden Gases award for its innovative new Steamer Turbo. The Steamer Turbo delivers water vapor blended with either oxygen or nitrogen at flows up to 50 slm.

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VacExpo 2012

Ricoh Arena , Coventry, UK , 17-18 October 2012

Megatech will be exhibiting at the UK’s premier vacuum technology event in Coventry. Join us on Stand V22 where we will be presenting the new 835 Vacuum Quality Monitor from Granville-Phillips.

Medtec UK 2012

Hall 9, NEC , Birmingham, UK , 23-24 May 2012

Megatech will be exhibiting at the UK’s premier medical technology event in Birmingham. Join us on Stand 1302 where we will be introducing the Synergy life sciences product range from Entegris. We will also be presenting the Lytron range of chillers and heater/chillers, plus infra-red temperature measurement and thermal imaging products from Process Sensors.