Brooks Instrument add Megatech as new specialty representative serving strategic Semiconductor and Thin-Film customers in the United Kingdom and Ireland

Megatech are pleased to announce that they have been appointed as Brooks Instrument’s new specialty representative serving strategic Semiconductor and Thin-Film customers in the United Kingdom and Ireland.

Brooks Instrument provides the broadest array of flow products in the market. Their award-winning flow meters and flow controllers consistently rank at the top of their category for accuracy, reliability, and user preference, as judged by the audience that matters – users of flow instruments.

More details to follow soon.

Megatech adds Angstrom Sciences and Nova Fabrica to its portfolio

Megatech have announced that they have been appointed authorised distributors for two leading companies in the magnetron sputtering and process control areas. They are Angstrom Sciences and Nova Fabrica.

Peter White the managing director of Megatech commented “The inclusion of these two companies extends our ability to supply the latest state of the art products to both established and new clients.”

Angstrom Sciences which is based in Pittsburgh U.S. founded in 1988 is a leading manufacturer of planar and cylindrical magnetrons, which are used to produce thin films through the ‘sputtering’ process.

Nova Fabrica is based in Lithuania and designs and manufactures process control systems and associated hardware for the thin film industries that use vacuum coating and plasma processing methods. Their FlowTron system allows the deposit of dielectric thin films giving low absorption losses of difficult materials. In addition they manufacture sensors and auxiliary hardware.

Sputtering is used in the manufacture of a diverse range of products which include compact disks, energy efficient architectural glass, optical components, flat panel displays and semiconductors.

For further information contact Alan Hasell on 01543 500044 or email

New Website with Web Sales

Hello and welcome to the new look Megatech website. The major innovation for us is the addition of   a web store allowing direct purchase of some of our products from the site.

Over the coming weeks we will be adding further products to the store, but for now we have a selection of Thermal Evaporation Sources and Quartz Monitor Crystals available for purchase.

Christmas Holidays 2012

Megatech will be closing for our Christmas holidays at midday on Friday 21st December 2012. Our office will open again on Wednesday 2nd January 2013.

We would like to take this opportunity to wish all our customers and partners a very Merry Christmas and a prosperous New Year!

RASIRC Process News August 29, 2012

RASIRC Process News
August 29, 2012
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Foundry TOX grown 87% faster with New RASIRC Process

1000Å thick films on 300mm silicon wafer within 1.5% StdDev


Joint development between WRS Materials and RASIRC produced improved thermal oxide uniformity on 300 mm wafers while reducing the thermal oxide step from 100 minutes to 13 minutes.Tests recently confirmed a breakthrough in oxide film growth. 1000 Å films can now be grown on 300 mm wafers 87% faster than previously done with dry oxide. The new process involves a high flow rate of steam and oxygen. Uniformity was proven to be within 1.5% standard deviation. The faster process will allow manufacturers to increase production without adding new furnace tubes.
The new process overcomes serious technical challenges. To prevent uniformity issues, the process chamber is rapidly saturated with steam and oxygen. The steam is ultra-high purity, eliminating microdroplets. The oxygen is heated, avoiding condensation when the gases are blended.


Other devices commonly used to generate steam flow are inadequate for this application. Bubblers deliver only 15 slm and entrain droplets that cause non-uniformity. Torches operate at extremely high temperatures and consume volatile gases. As a result, torches have high costs, safety risks and special facility requirements.


The two companies have collaborated on a paper that details test protocols, results and provides guidelines for flow rate, thermal oxide thickness, and uniformity to optimize process recipe and reduce the time needed to achieve uniformity relative to gas flow rate.

New Product Release


Following the results of the joint development with WRS Materials, RASIRC commercialized the Steamer Turbo. RASIRC Steamer Turbo meets high flow requirements, saturating 400 mm furnaces in less than 2 minutes.
This device delivers ultra high purity steam blended with oxygen for high flow rate applications. The Steamer Turbo is able to deliver up to 100 slm of high temperature compressed gas with 50 slm of steam repeatable to ±1%


RASIRC wins Golden Gases Award

RASIRC was recently awarded the Golden Gases award for its innovative new Steamer Turbo. The Steamer Turbo delivers water vapor blended with either oxygen or nitrogen at flows up to 50 slm.

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VacExpo 2012

Ricoh Arena , Coventry, UK , 17-18 October 2012

Megatech will be exhibiting at the UK’s premier vacuum technology event in Coventry. Join us on Stand V22 where we will be presenting the new 835 Vacuum Quality Monitor from Granville-Phillips.

Entegris Launches New Life Sciences Website

BILLERICA, Mass. – June 14, 2012 – Entegris, Inc. (NASDAQ: ENTG) announced the launch of its new website for the Life Sciences market – The site is designed to provide professional and technical staff in the Life Sciences industry with information about -ultrapure, robust, and cost efficient solutions including fluid handling components, containers, filter devices, and biomaterials for biotech, pharma, medical device and related applications. The site will also offer research from Entegris’ engineering initiatives, including technical presentations, application notes, and papers addressing a variety of existing and emerging issues.

The Life Sciences website leverages Entegris’ 40 plus years of experience helping high-tech industries solve challenging contamination control, high-performance applications and material transportation issues. With a portfolio of more than 17,000 products and global manufacturing, customer services and technical support, Entegris provides a one-stop shop with of products and materials that allow users to manage the processing of their critical materials more efficiently and effectively. This improves their ability to achieve increasingly more stringent efficacy and safety objectives.

For more information, visit.

Medtec UK 2012

Hall 9, NEC , Birmingham, UK , 23-24 May 2012

Megatech will be exhibiting at the UK’s premier medical technology event in Birmingham. Join us on Stand 1302 where we will be introducing the Synergy life sciences product range from Entegris. We will also be presenting the Lytron range of chillers and heater/chillers, plus infra-red temperature measurement and thermal imaging products from Process Sensors.