ESC Series Electrostatic Chuck Power Supplies
1, 2, 3 & 5 kV Models, Available with Selectable Features and Flexible Packaging Options
Performance:
Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with NRTL product safety marks, built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.
Application:
The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.
Features:
- Reduced risk of permanent charge on chuck through output polarity reversal
- Low stored energy and built-in current limitations to safeguard from surges and arcs
- Short circuit and open circuit proof design for enhanced reliability
- ETL Marked for product safety and CE compliant
- Built-in RF filtering
Options:
Flexible packaging options available
- ESC OEM: Imbedded model
- ESC Dual: Single output connector and built-in voltage and current monitor
- ESC Mini: X-small package design (2.5"H x 4.75"W x 9.5"D)
- ESC 5: 5kV unipolar output (available in positive or negative polarity)
ESC-HV Electrostatic Chuck Power Supply
6, 7, 8, 9 & 10 kV Models Available
Performance:
Comdel's ESC-HV, Comdel's latest electrostatic chuck power supply, can be configured to deliver from 6 to 10KV of power for reliable handling in large surface processes. Equipped with low stored energy and built-in current limiting, the ESC-HV will safeguard your process from surges and arcs. This user-friendly design contains parameter adjustments through variable controls, and is fully programmable to give the user maximum flexibility. Contained in a compact chassis weighing 2.5 lbs, the ESC-HV can be located in any convenient location and in any orientation.
Application:
The ESC-HV power supply provides reliable handling in large surface processes.
Features:
- Low stored energy and built-in current limitations to safeguard from surges and arcs
- Short circuit and open circuit proof design for enhanced reliability
- No special requirements needed for cooling and shielding
- Parameter adjustments through variable controls and fully programmable to give the user maximum flexibility
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