Megatech Limited - Enabling Technology
products
Affinity Chillers
Brooks - Polycold Systems
Brooks - CTI-Cryogenics®
Brooks - Granville-Phillips®
CO2 Snow Jet Cleaning
Comdel
Entegris
Ferrotec - Ferrofluidic Seals
Ferrotec - Electron Beam Guns
Mactronix
Process Sensors
RASIRC UHP Steam
Reactaflo
PDS-1
PDS-2
Thermal Evaporation Sources
UVOCS
Verity Instruments
Reactaflo

The Megatech Limited Reactaflo is a Reactive Sputtering Process Controller that delivers the following benefits:

  • Higher Deposition Rates for Dielectric / insulator films.
  • New areas of film Stoichiometry can be produced (for example production of "as deposited" conducting oxides)
  • Accurate and repeatable control over reactive deposition processes

Two models are available - the PDS-1 and the PDS-2. These are described on the following pages.

 

 
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