|
The Megatech
Limited Reactaflo
is a Reactive Sputtering Process Controller that delivers the following
benefits:
- Higher
Deposition Rates for Dielectric / insulator films.
- New areas of
film Stoichiometry can be produced (for example production of "as
deposited" conducting oxides)
- Accurate and
repeatable control over reactive deposition processes
Two models are
available - the PDS-1 and the PDS-2. These are described on the
following pages.
|
