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The Megatech Limited Reactaflo is a Reactive Sputtering Process Controller that delivers the following benefits:
- Higher Deposition Rates for Dielectric / insulator films.
- New areas of film Stoichiometry can be produced (for example production of "as deposited" conducting oxides)
- Accurate and repeatable control over reactive deposition processes
Two models are available - the PDS-1 and the PDS-2. These are described on the following pages.
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