Megatech Limited - Enabling Technology
products
Gas Purification
Chillers
CO2 Snow Jet Cleaning
Comdel
Entegris
Ion Gauge Tubes
Mactronix
Polycold Systems
Process Sensors
Quartz Monitor Crystals
RASIRC UHP Steam
Reactaflo
PDS-1
PDS-2
Rigaku Vacuum Products
Telemark
Thermal Evaporation Sources
UVOCS
Verity Instruments
Reactaflo

The Megatech Limited Reactaflo is a Reactive Sputtering Process Controller that delivers the following benefits:

  • Higher Deposition Rates for Dielectric / insulator films.
  • New areas of film Stoichiometry can be produced (for example production of "as deposited" conducting oxides)
  • Accurate and repeatable control over reactive deposition processes

Two models are available - the PDS-1 and the PDS-2. These are described on the following pages.

 

 
Copyright © 2006 Megatech Limited. All rights reserved.