Omni-Lev
A breakthrough in zero-contamination vacuum motion
Omni-Lev is Rigaku's new rotary actuator system for use in contamination-sensitive applications. Unlike traditional ball bearing based actuators, Omni-Lev is supported entirely by magnetic fields, eliminating contact between moving parts that can generate damaging particles. This invention (patent pending) resulted from a two-year development at Rigaku's vacuum business unit, Rigaku Mechatronics.
Omni-Lev's non-contact mechanism not only eliminates particulate generation but also eliminates friction, resulting in very accurate positioning, ultra-low shaft runout, very long life and the virtual elimination of maintenance. Another important feature is the all-metal construction, allowing the actuator to be used in UHV-vacuum level environments as well as in corrosive gas or liquid settings, as commonly encountered in semiconductor manufacturing processes. Semiconductor chip companies drove the need for Omni-Lev development, which is a natural outgrowth of Rigaku's vacuum rotary motion feedthrough business.
Features
- Ultra-clean: zero particle generation
- All metal sealed construction
- Zero outgassing
- Zero friction
- Ultra-low runout
- Zero leakage
- UHV compatible
- Gas or liquid compatible
- Corrosive environment compatible
- High temperature tolerance
- Ultra-low vibration
- Ultra-high-speed capable
- Zero maintenance
- No oils or fluids used
- No bearings in vacuum
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