Portable Spectrograph PPDS
The heart of Verity's Portable Plasma Diagnostic System is Verity's SD1024F Series spectrograph and SpectraView applications software. The carry case can be configured to include the specific items needed for your application. The choices for spectrograph include:
SD1024F
- For demanding applications
- Scientific grade CCD
- RoHS Compliant
SD1024DL
- For general purpose applications
SD2048DL
- For high resolution applications
- Bright plasma required
All items are enclosed within a compact carry case for portability and ease of use. Two different chamber connection types are included to provide a secure fiber optic connection to most chamber types.
Features and Benefits
- Includes spectrograph, fiber optic cable, chamber connection, laptop computer and carry case
- Versatile; use for troubleshooting, finger printing, chamber matching, and to verify tool endpoint detection system
- Non-invasive, optical measuring technique does not break vacuum
- Fast set-up; system can collect data within a few minutes after set-up
- Configurable; select spectrograph type and accessories as required
- Portable; all items pack within 17.75" (451mm) x 14.5" (386mm) x 12" (305mm) carry case
- Easy-to-use; includes all items necessary for spectral data collection and analysis
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