Spectral Reflectometer SP2006

Spectral reflectometry is a proven technology for the measurement of thin films. Polychromatic light incident on the wafer is reflected from the wafer surface and various layer interfaces. At a given wavelength, the reflected light will exhibit interference phenomena that may be analyzed to determine various properties of the thin film(s) on the wafer surface.

The ability of the spectrograph to measure multiple wavelengths simultaneously permits rapid determination of two of the most commonly desired film properties: layer thickness and material optical constants.

Verity's SP2006 Spectral Reflectometer is designed for a wide variety of film thickness applications, including those required in etch, CVD and CMP processes. Verity Spectral Reflectometers are successfully controlling hundreds of semiconductor process tools worldwide.

The key components of the SP2003 are the SD1024F spectrograph, FL2006 Xenon flashlamp, and SpectraViewT applications software. The heart of the SP2006 is the SD1024F Spectrograph, which uses a scientific grade CCD detector for excellent dynamic range, UV detection capability, and low noise. The SD1024F also has capability for multi-fiber input operation, and controls the flashlamp.

The FL2006 flashlamp is a bright, broadband source useful for the applications described herein. The FL2006's output has a strong UV content thus enabling the measurement of relatively thin film layers that would not otherwise be possible using a reflectometer. Since a flashlamp is used, the motion of moving wafers does not result in the blurring of data, which enables more accurate measurement.

The SpectraViewT PC host application provides robust film thickness determination through a variety of "open" algorithms. SpectraViewT enables integration with tool-to-application-PC communication based on RS232, Ethernet or DI/O.

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