Spectrograph SD1024F Series
The SD1024F Series spectrographs are optical emission monitors that integrate sophisticated embedded processors and software designed to provide intelligent instrument control, data acquisition and endpoint interface capabilities. The SD1024F Series uses common electronics, application software and enclosures. The differences between the SD1024F, the SD1024DL, and the SD2048DL are the charge coupled device (CCD), optical platform and embedded software parameters.
The SD1024F is designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024F include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the element of the two dimensional detector array.
The SD1024FH was designed for the most demanding applications. Signal to Noise performance is achieved via
a ~ 75% greater optical throughput, proprietary data
acquisition scheme, novel signal processing methods,
and superior system noise control.
Spectrograph SD1024DL
The SD1024DL was designed for general purpose semiconductor process applications. It uses a 2048-element, one-dimensional CCD designed for cost effective operation. The CCD is phosphor coated for UV sensitivity. The SD1024DL uses a simple optical platform and the same 16-bit A/D electronics as the SD1024D.
Spectrograph SD2048DL
The SD2048DL is nearly identical to the SD1024DL, but reports spectral data in 0.25nm increments instead of 0.5nm readings as in the SD1024D and SD1024DL. This is done by using a narrower inlet slit and modified embedded software parameters. Although the SD2048DL has better resolution than the SD1024DL, its sensitivity is diminished by about one order of magnitude.
Features and Benefits
- Provides robust endpoint determination
- SpectraViewT software provides:
- Variety of algorithms
- Open algorithms and sequences for flexibility
- Tool integration via Ethernet, RS232, and DI/O
- Use for endpoint detection, fault detection, and process diagnostics
- 200-800nm range
Summary
SD1024F
- For demanding applications
- Single or multi-fiber input
- Scientific grade CCD
- RoHS Compliant
SD1024DL
- For general purpose applications
SD2048DL
- For high resolution applications
- Bright plasma required
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