Megatech Limited - Enabling Technology
products
Gas Purification
Chillers
CO2 Snow Jet Cleaning
Comdel
Entegris
Ion Gauge Tubes
Mactronix
Polycold Systems
Process Sensors
Quartz Monitor Crystals
RASIRC UHP Steam
Reactaflo
Rigaku Vacuum Products
Telemark
Thermal Evaporation Sources
UVOCS
Verity Instruments
Spectograph SD1024F
Spectral Reflectometer SP2006
Spectograph, NIR, SD512NIR
Portable Spectograph PPDS
Monochromators EP200 Series
Detectors PM100/140 Series
Dual Detectors PM200/225 Series
Verity Instruments
Verity Instruments - Optical Endpoint

Optical Endpoint Detection Systems

Verity Instruments is the leading supplier of optical endpoint detection systems to the Semiconductor Industry. They provide integrated solutions for endpoint detection, film thickness measurement, wafer state interferometry, fault detection and plasma diagnostics. In support of Advanced Process Control, their products are typically used in situ, providing real time control.

With over 20 years of experience developing and supporting OEM customers, Verity has become the de facto standard for optical endpoint process control. Their robust instrument design, compact form factors, attention to detail and strong price/performance ratio are a direct byproduct of their scientific and engineering resources, corporate infrastructure and customer commitment.

 
Copyright © 2006 Megatech Limited. All rights reserved.