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Vacuum Capacitance Manometers

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Vacuum Capacitance Manometers

Rugged, Stable Capacitance Manometers For Process Vacuum Measurement

Brooks digital capacitance manometers incorporate industry-leading features that combine to improve measurement reliability, minimize drift, resist diaphragm contamination, and minimize thermal effects. The result is an exceptionally reliable capacitance manometer family for all vacuum measurement applications.

An important benefit of a Brooks capacitance manometer is its advanced Mark-IV sensor. The sensor chamber contains surface areas that are not used in the pressure measurement; these surfaces provide locations for particles and condensable vapors to accumulate without affecting the sensor, dramatically reducing the need for re-zeroing and greatly extending sensor life. The sensor diaphragm is made from corrosion resistant Inconel®.

Because they are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy.



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