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GF40, GF80, GF81 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters View full size

GF40, GF80, GF81 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters

Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.

  • Elastomer or metal seal
  • Fast sub 1 second settling time
  • MultiFlo™ gas and range configurability
  • Corrosion-resistant Hastelloy® sensor tube
  • Now available up to 300 slpm

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GF40/80 Elastomer and Metal Seal Digital Mass Flow Controllers & Mass Flow Meters

Brooks GF40 (elastomer seal) and GF80 (metal seal) thermal mass flow controllers (MFCs) and thermal mass flow meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications.

At the heart of the GF40/GF80 is Brooks' patented 4th generation MultiFloTM capable device. MultiFlo overcomes a long-standing limitation of many thermal MFCs – when changing gas types, a simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy-robbing viscosity and density differences. The Brooks MultiFlo database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases making the GF40/GF80 Series among the most accurate and flexible MFCs/MFMs available today.

The Brooks GF40/GF80 Series is the perfect choice for customers who use thermal mass flow controllers or thermal mass flow meters on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy. Some examples:

    • OEMs will reduce the number of gas- and range-specific MFCs that they inventory
    • Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing and similar large users of mass flow meters and mass flow controllers will greatly reduce their gas- and range-specific spares inventory
    • R&D, research, and laboratory users can quickly change experiment conditions and achieve much better actual process gas accuracy vs traditional mass flow controllers and mass flow meters


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