Orders & Support +44 (0)1543 500 044
GF100 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters View full size

GF100 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters

Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path.

  • Ultra-fast 300-millisecond settling time
  • Optional pressure transient insensitive (PTI), high accuracy and SDS models available
  • MultiFlo™ gas and range configurability
  • Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)
  • Now available up to 300 slpm

More details

GF100 Series Ultra-High Purity Metal Seal Thermal Mass Flow Controllers & Thermal Mass Flow Meters

Designed for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability, and flexibility. Highlights of the GF100 series industry leading features include: ultra fast 300 millisecond settling time, MultiFlo™ gas and range programmability, optional pressure transient insensitivity (PTI), local display, extremely low wetted surface area, and corrosion resistant Hastelloy® sensor tube and valve seat. The GF100 series has been marathon tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time. An independent diagnostic/service port permits users to troubleshoot or change flow conditions without removing the mass flow controller from service.

MultiFlo™ gas and range programmability, a patented technology developed and refined by Brooks over the last 10 years, has changed the mass flow controller industry by offering customers the ability to select new gas calibrations and full scale ranges without the trouble and cost of removing the mass flow controller from the gas line. The GF100 Series fourth generation MultiFlo technology continues to lead the market with the most accurate and broadest range performance through extensive refinement and physical validation on critical process gases.

Cart  

No products

£ 0.00 Shipping
£ 0.00 Total

Cart Check out