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GF135 Advanced Diagnostics Thermal Mass Flow Controller View full size

GF135 Advanced Diagnostics Thermal Mass Flow Controller

Pressure Transient Insensitive Mass Flow Controller with Real-Time flow error dectection and advanced diagnostics

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The GF135 is a revolutionary pressure transient insensitive (PTI) mass flow controller for semiconductor manufacturing. The GF135 improves yield and uptime with real-time integral rate-of-decay flow measurement. "Smarter" advanced diagnostic capabilities let users verify accuracy, check valve leak-by, and monitor sensor drift without stopping production of wafers. These game-changing features can lead to thousands of pounds in daily cost savings for manufacturing facilities:

  • Real-time rate-of-decay flow error detection technology continually tests for changes in device performance
  • Onboard diagnostic logging, zero stability trending and correction, and early detection of valve corrosion or clogging
  • Ultra-fast flow settling time for reduced process cycle times
  • Market-leading process gas accuracy


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