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PM Detectors


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The PM100/140 Series detectors are used to measure a single fixed wavelength in the range of 185-830nm. When used with Verity's system controllers, the PM100/140 Series provides robust endpoint detection when used in the appropriate applications. This series is most commonly used in applications where the chemistry is simple enough that a fixed 10nm bandpass detector is suitable. At some wavelengths, alternative filters with a lower bandpass may be available.

The PM100 mounts to a viewport and includes an integral light aperture located on the bottom of the instrument. The PM140 includes a KF40 flange for mounting to the vacuum chamber. A quartz or sapphire window provides vacuum isolation. A sapphire window provides better resistance to window etching than the quartz window.


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